Integration of carbon nanotube-based sensors to a flip-chip package for micro-strain detection in microelectronic package

Julien Pezard (1) , Yosri Ayadi (1) , A Elshaer (1) , E Duchesne (2) , Hélène Frémont (3) , Dominique Drouin (1)

1 3IT - Institut Interdisciplinaire d'Innovation Technologique [Sherbrooke]
2 IBM Canada
3 IMS - Laboratoire de l'intégration, du matériau au système

Domaines: Sciences de l'ingénieur [physics]

Julien Pezard, Yosri Ayadi, A Elshaer, E Duchesne, Hélène Frémont, et al.. Integration of carbon nanotube-based sensors to a flip-chip package for micro-strain detection in microelectronic package. NME, Sep 2019, Rhodes, Greece. ⟨hal-02453585⟩