A Weak Form Nonlinear Model for Thermal Sensitivity of Love Wave Mode on Layered Structures

Yang Yang (1) , Harshad Mishra (2) , Qiaozhen Zhang (1) , Sami Hage-Ali (2) , Tao Han (1) , Omar Elmazria (2)

1 Shanghai Jiao Tong University [Shanghai]
2 IJL - Institut Jean Lamour

A precise theoretical model for the thermal sensitivity of Love wave mode is significant in the structure design, temperature compensation, and the prediction of thermal behavior. This paper proposes a weak form nonlinear model to calculate the thermal sensitivity of Love waves on arbitrary layered structures. The third-order material constants, as well as the thermal stress and strain tensors between the substrate, electrodes, and wave-guiding layer, are taken into account in the model. The 9×9 effective elastic matrix and the 3×9 effective piezoelectric matrix are imported into the nonlinear constitutive equations and boundary conditions using weak form expressions. A temperature-compensated Love wave mode resonator on a layered ZnO/IDT/quartz structure is obtained. The theoretical model is verified through the comparison of experimental and analytical results. The model is beneficial for the design of Love wave devices and sensors.

Mots clés: frequency temperature characteristic; third-order constants; thermal sensitivity; Love wave

Domaines: Acoustique [physics.class-ph]; Micro et nanotechnologies/Microélectronique

Yang Yang, Harshad Mishra, Qiaozhen Zhang, Sami Hage-Ali, Tao Han, et al.. A Weak Form Nonlinear Model for Thermal Sensitivity of Love Wave Mode on Layered Structures. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2020, 67 (6), pp.1275-1283. ⟨10.1109/TUFFC.2020.2968007⟩. ⟨hal-02447088⟩