New corn-based sacrificial layer for MEMS based on screen-printed PZT ceramics

Simon Grall (1) , Onuma Santawitee (1) , Isabelle Dufour (1) , Vincent Aubry (2) , Hélène Debéda (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 PSA - PSA Peugeot - Citroën

Domaines: Sciences de l'ingénieur [physics]; Micro et nanotechnologies/Microélectronique

Simon Grall, Onuma Santawitee, Isabelle Dufour, Vincent Aubry, Hélène Debéda. New corn-based sacrificial layer for MEMS based on screen-printed PZT ceramics. Sensors and Actuators A: Physical , 2020, 304, pp.111826. ⟨10.1016/j.sna.2019.111826⟩. ⟨hal-02442390⟩