Capacitive silicon micro-electromechanical resonator for enhanced photoacoustic spectroscopy

Kaim Chamassi (1) , Wioletta Trzpil , Richard Arinero (1, 2) , Roman Rousseau , Aurore Vicet (1, 2) , Michaël Bahriz (1, 2)

1 IES - Institut d’Electronique et des Systèmes
2 NANOMIR - Composants à Nanostructure pour le moyen infrarouge

Domaines: Electronique

Kaim Chamassi, Wioletta Trzpil, Richard Arinero, Roman Rousseau, Aurore Vicet, et al.. Capacitive silicon micro-electromechanical resonator for enhanced photoacoustic spectroscopy. Applied Physics Letters, 2019, 115 (8), pp.081106. ⟨10.1063/1.5098140⟩. ⟨hal-02441779⟩