Realization and characterization of diamond micro-transducers for bio-chemical sensing

Alexandre Bongrain (1) , Emmanuel Scorsone (1) , Lionel Rousseau (2) , Gaelle Bazin Lissorgues (2) , Samuel Saada (1) , Philippe Bergonzo (1)

1 LCD (CEA, LIST) - Laboratoire Capteurs Diamant (CEA, LIST)
2 ESYCOM - Electronique, Systèmes de communication et Microsystèmes

We report on novel MEMS micro-transducers made of diamond and used for bio-sensing applications. To overcome the non straightforward micro-machining of diamond, we developed an original process involving the patterned growth of diamond using the CVD (chemical vapour deposition) technique, inside micro-machined silicon moulds. Typical MEMS structures were successfully fabricated and include cantilevers and bridges. They were actuated using Laplace forces. The structures were characterized by measuring their first mode resonance (frequency and Q-factor) using laser interferometry. The measured data fitted the simulated data and comparison with equivalent silicon structures showed the superior resonant properties of diamond cantilevers. It implies that the later are potentially more sensitive transducers than their silicon counterpart.

Mots clés: diamond; biosensor; MEMS micro-transducers; diamond growth; CVD (Chemical Vapour Deposition); resonant properties; diamond micro-transducer; biochemical sensing; Polycrystalline diamond; bio-chemical sensing

Domaines: Micro et nanotechnologies/Microélectronique; Electromagnétisme; Matériaux; Electronique; Biomatériaux

Alexandre Bongrain, Emmanuel Scorsone, Lionel Rousseau, Gaelle Bazin Lissorgues, Samuel Saada, et al.. Realization and characterization of diamond micro-transducers for bio-chemical sensing. Eurosensors XXIII, Ecole Polytechnique Federale de Lausanne, Sep 2009, Lausanne, Switzerland. pp.754-757, ⟨10.1016/j.proche.2009.07.188⟩. ⟨hal-02437442⟩