A New Technology of Ultrathin AlN Piezoelectric Sensor for Pulse Wave Measurement

A. Bongrain (1) , Lionel Rousseau (2) , Laurie Valbin (2) , N. Madaoui (2) , Gaelle Bazin Lissorgues (2) , Fabrice Verjus (3) , P.A. Chapon (4)

1 Chercheur indépendant
2 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
3 NXP Semiconductors
4 COMETE - Mobilités : Attention, Orientation et Chronobiologie

In this study the design and characterization of a new technology of ultrathin AlN piezoelectric sensors able to measure micro-deformations is reported. The sensors are fabricated using a CMOS compatible clean room process in which the sensitive part is embedded into a thin bio-compatible and conformal layer of parylene (total thickness below 10 µm). That makes the sensors very flexible and sensitive to micro-deformation measurements. In this study, this technology is applied to monitor heart activity: heart rate, blood pulse wave, pulse wave velocity. Blood pulse wave could be measured with a very good accuracy; this technology could thus be used for the prediction of cardiovascular diseases by analyzing the pulse wave shape.

Mots clés: piezo-electric sensor; AlN; cardiac patch; cardiac pulse wave monitoring Keywords: Type your keywords here; separated by semicolons

Domaines: Electromagnétisme; Matériaux; Micro et nanotechnologies/Microélectronique; Electronique; Biomatériaux

A. Bongrain, Lionel Rousseau, Laurie Valbin, N. Madaoui, Gaelle Bazin Lissorgues, et al.. A New Technology of Ultrathin AlN Piezoelectric Sensor for Pulse Wave Measurement. Procedia Engineering, 2015, 120, pp.459-463. ⟨10.1016/j.proeng.2015.08.668⟩. ⟨hal-02434428⟩