Integrated Photonic Crystal Cavity for Terahertz Waves on a Free-Standing Silicon Platform

Mattias Verstuyft (1, 2) , Elias Akiki (3, 4) , Guillaume Ducournau (3, 4) , Benjamin Walter (5) , Marc Faucher (3, 6) , Estelle Mairiaux (5, 3, 7) , Jean-Francois Lampin (3, 4) , Mathias Vanwolleghem (3, 4) , Bart Kuyken (1, 2)

1 Photonics Research Group
2 UGENT - Universiteit Gent = Ghent University
3 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
4 PHOTONIQUE THZ - IEMN - Photonique THz - IEMN
5 Vmicro SAS
6 NAM6 - IEMN - Nano and Microsystems - IEMN
7 ANODE - IEMN - Advanced NanOmeter DEvices - IEMN

Domaines: Sciences de l'ingénieur [physics]; Micro et nanotechnologies/Microélectronique

Mattias Verstuyft, Elias Akiki, Guillaume Ducournau, Benjamin Walter, Marc Faucher, et al.. Integrated Photonic Crystal Cavity for Terahertz Waves on a Free-Standing Silicon Platform. Optical Terahertz Science and Technology (OTST'19), 10-15 March, Santa Fe, NM, USA, Mar 2019, Santa Fe, United States. ⟨hal-02409541⟩