Fracture resistance of Ti-Ag thin films deposited on polymeric substrates for biosignal acquisition applications

A. Etiemble (1) , C. Lopes (2) , G.I. Nkou Bouala (3) , J. Borges (4) , A. Malchère , C. Langlois (3) , F. Vaz (4) , P. Steyer (3)

1 ECAM Lyon - ECAM Lyon
2 FOI - Swedish Defence Research Agency [Stockholm]
3 MATEIS - Matériaux, ingénierie et science [Villeurbanne]
4 CFUM - Centro de Física da Universidade do Minho

The ability of magnetron sputtered Ti-Ag thin films deposited on polymeric substrate to be used as sensors for biosignal acquisition is investigated. Influence of the Ag content on the microstructure of TiAgx thin films prepared by magnetron sputtering is characterized by X-ray diffraction and electron microscopies. Three characteristic composition ranges are identified: Ti-rich, Ti-Ag and Ag-rich thin films. Their mechanical and electrical properties are then evaluated. Thin film fracture resistance on polymer substrate (polyethylene terephthalate) is studied by scanning electron microscopy micrographs performed during an in situ uniaxial stretching test. The key role of thin film composition and microstructure is highlighted, pointing out the positive effect of silver. © 2018 Elsevier B.V.

Mots clés: Binary alloys; Biosensors; Fracture; Fracture toughness; Magnetron sputtering; Microstructure; Plastic bottles; Polymers; Scanning electron microscopy; Substrates; Titanium alloys; Biomedical sensors; Fragmentation; In-situ electron microscopy; Magnetron-sputtering deposition; Mechanical and electrical properties; Polymeric substrate; Thin film composition; Uniaxial stretching; Thin films

Domaines: Matériaux

A. Etiemble, C. Lopes, G.I. Nkou Bouala, J. Borges, A. Malchère, et al.. Fracture resistance of Ti-Ag thin films deposited on polymeric substrates for biosignal acquisition applications. Surface and Coatings Technology, 2019, 358, pp.646-653. ⟨10.1016/j.surfcoat.2018.11.078⟩. ⟨hal-02405471⟩