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Communication Dans Un Congrès Année : 2019

Numerical simulations of nanosecond laser annealing of Si nanoparticles for plasmonic structures

Résumé

This paper reports numerical simulations of nanosecond laser thermal annealing of plasmonic structures based on Si-nanoparticles embedded in a SiO 2 matrix. From these simulations, we extracted guidelines for the structure design to be adopted. This study also investigates the expected laser annealing process window and the influence of nanoparticles coverage.
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Dates et versions

hal-02392503 , version 1 (04-12-2019)

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A-S. Royet, S. Kerdiles, P. Acosta Alba, Caroline Bonafos, Vincent Paillard, et al.. Numerical simulations of nanosecond laser annealing of Si nanoparticles for plasmonic structures. 2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2019, Udine, Italy. pp.1-4, ⟨10.1109/SISPAD.2019.8870529⟩. ⟨hal-02392503⟩
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