Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass

Rémi Meyer (1) , Luc Froehly (1) , Remo Giust (1) , Jesus del Hoyo (1) , Luca Furfaro (1) , Cyril Billet (1) , François Courvoisier (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

We report on the development of an ultrafast beam shaper capable of generating Bessel beams of high cone angle that maintain a high intensity hot spot with subwavelength diameter over a propagation distance in excess of 8 mm. This generates a high intensity focal region with extremely high aspect ratio exceeding 10 000:1. The absence of intermediate focusing in the shaper allows for shaping very high energies, up to Joule levels. We demonstrate a proof of principle application of the Bessel beam shaper for stealth dicing of thick glass, up to 1 cm. We expect that this high energy Bessel beam shaper will have applications in several areas of high intensity laser physics.

Domaines: Optique [physics.optics]

Rémi Meyer, Luc Froehly, Remo Giust, Jesus del Hoyo, Luca Furfaro, et al.. Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass. Applied Physics Letters, 2019, 114 (201105). ⟨hal-02382663⟩