Steps Towards Large Mylar Membrane Based Multiple Transducers, Application to Chemical Adsoptions Sensors

Jorel Corentin (1) , Didier Robbes (1) , Matthieu Denoual (1) , Julien Grand (1) , Svetlana Mintova , Loïc Le Marrec (2)

1 UNICAEN - Université de Caen Normandie
2 IRMAR - Institut de Recherche Mathématique de Rennes

Integrated gas sensors and measuring systems are desired devices in many domains, including large scales applications. One of the main issue still is their poor chemical selectivity despite the very wide diversity of developed systems. In this paper, we present our approach based on selectively adsorbing zeolite thin films. A full instrument has been developed with up to five transduction means based on a single adsorbing layer of zeolite. That layer is suspended on a large Mylar membrane capped with a functionalized Aluminum thin film. We present also an analytical mechanical model that allows estimating the instrument intrinsic possibilities.

Mots clés: Chemical Sensor; Membranes; Zeolite; Single Input -Multiple Output; Mechanical Model

Domaines: Mécanique [physics]

Jorel Corentin, Didier Robbes, Matthieu Denoual, Julien Grand, Svetlana Mintova, et al.. Steps Towards Large Mylar Membrane Based Multiple Transducers, Application to Chemical Adsoptions Sensors. 21st Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP), Juillard, J; Lefeuvre, E; Mailly, F; Mita, Y; Nouet, P; Pressecq, F; Schneider, P; Smith, S, May 2019, Paris, France. ⟨hal-02379327⟩