Characterization of transport of neutral and ionized species in reactive-HiPIMS process (R-HiPIMS)

D. Boivin (1) , A. Najah (1) , A. El Farsy (1) , C. Noël (1) , S. Cuynet (1) , T. Belmonte (1) , L. De Poucques (1)

1 IJL - Institut Jean Lamour

Domaines: Physique des plasmas [physics.plasm-ph]

D. Boivin, A. Najah, A. El Farsy, C. Noël, S. Cuynet, et al.. Characterization of transport of neutral and ionized species in reactive-HiPIMS process (R-HiPIMS). PLATHINIUM - Plasma Thin film International Union Meeting, Sep 2019, Antibes, France. ⟨hal-02372043⟩