Investigation of Non-Uniformity of Classically-Polished Fused Silica Surfaces via Laser-Induced Breakdown Spectroscopy

Abstract : In this contribution, the surface uniformity of classically-manufactured fused silica windows was investigated via laser-induced breakdown spectroscopy. It is shown that for all investigated samples a comparatively high aluminium content was found at the edge of the surface with respect to its centre. This contamination can be attributed to residues from lapping and polishing agents and leads to a mentionable non-uniformity of the surface in terms of chemical composition and optical properties, respectively.
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Christoph Gerhard, Jorg Hermann. Investigation of Non-Uniformity of Classically-Polished Fused Silica Surfaces via Laser-Induced Breakdown Spectroscopy. EPJ Web of Conferences, EDP Sciences, 2019, EOS Optical Technologies, 215, pp.08003. ⟨10.1051/epjconf/201921508003⟩. ⟨hal-02350952⟩

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