Influence of magnetic field strength on nanoparticle growth in a capacitively-coupled radio-frequency Ar/C 2 H 2 discharge

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https://hal.archives-ouvertes.fr/hal-02350930
Contributor : Stéphane Coussan <>
Submitted on : Wednesday, November 6, 2019 - 11:06:23 AM
Last modification on : Friday, November 8, 2019 - 1:00:27 AM

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L. Couedel, D Artis, M Khanal, C. Pardanaud, S. Coussan, et al.. Influence of magnetic field strength on nanoparticle growth in a capacitively-coupled radio-frequency Ar/C 2 H 2 discharge. Plasma Research Express, 2019, 1 (1), pp.015012. ⟨10.1088/2516-1067/ab045e⟩. ⟨hal-02350930⟩

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