High performance thin-film optical filters with stress compensation

Abstract : We present a thorough description of high performance thin-film optical filters with high flatness. These components can combine several tens or hundreds of layers and are manufactured using plasma-assisted reactive magnetron sputtering. Stress compensation is achieved using dual side coatings with appropriate spectral function. Examples of highly reflecting mirrors at 515 nm with 15 nm flatness peak-to-valley over up to 75 mm diameter aperture, narrow bandpass filters and filters with broadband controlled transmission are described.
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Submitted on : Wednesday, November 6, 2019 - 8:27:58 AM
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Thomas Begou, Fabien Lemarchand, Frédéric Lemarquis, Antonin Moreau, Julien Lumeau. High performance thin-film optical filters with stress compensation. Journal of the Optical Society of America. A Optics, Image Science, and Vision, Optical Society of America, 2019, 36 (11), pp.C113-C121. ⟨hal-02350443⟩

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