High kinetic inductance microwave resonators made by He-Beam assisted deposition of tungsten nanowires

Abstract : We evaluate the performance of hybrid microwave resonators made by combining sputtered Nb thin films with Tungsten nanowires grown under a He-beam induced deposition technique within a Focused Ion Beam setup. The normal state resistance R = 55 Ω/ of a w = 35 nm wide, t = 30 nm thick and l = 9.8µm long wire together with a critical temperature T c ∈ [4 − 6] K ensure a high kinetic inductance fraction which makes the resonator strongly nonlinear. Both lumped and coplanar waveguide resonators were fabricated and measured at low temperature exhibiting internal quality factors up to Qi = 4000 at 4.5 GHz for a temperature T = 10 mK in the few photon regime. Analyzing the wire length, temperature and microwave power dependence we extracted a kinetic inductance for the W nanowire of L K = 15.4 pH/ , a kinetic inductance fraction α W,He = 0.996 and a Kerr non-linearity of the microwave resonators as high as K W,He /2π = 180 Hz/photon at 4.5 GHz. This study allows us to conclude that the nanowires made with the He-FIB are very versatile objects to engineer compact, high impedance, superconducting environments recently called superinductors.
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Submitted on : Friday, November 8, 2019 - 3:44:27 PM
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J Basset, D. Watfa, G. Aiello, M. Féchant, A. Morvan, et al.. High kinetic inductance microwave resonators made by He-Beam assisted deposition of tungsten nanowires. Applied Physics Letters, American Institute of Physics, 2019, 114, pp.102601. ⟨10.1063/1.5080925⟩. ⟨hal-02349613⟩

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