Optimization of a microelectromechanical systems (MEMS) approach for miniaturized microcantilever-based RF microwave probes

Jaouad Marzouk (1) , S. Arscott (2, 3) , Abdelhatif El Fellahi (2) , Kamel Haddadi (2) , Christophe Boyaval (2) , Sylvie Lepilliet (2) , Tuami Lasri (2) , Gilles Dambrine (2)

1 MINACOM
2 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
3 NAM6 - IEMN - Nano and Microsystems - IEMN

Domaines: Sciences de l'ingénieur [physics]

Jaouad Marzouk, S. Arscott, Abdelhatif El Fellahi, Kamel Haddadi, Christophe Boyaval, et al.. Optimization of a microelectromechanical systems (MEMS) approach for miniaturized microcantilever-based RF microwave probes. Sensors and Actuators A: Physical , 2016, 238, pp.51-59. ⟨10.1016/j.sna.2015.10.043⟩. ⟨hal-02345465⟩