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Tilted beam SEM, 3D metrology for industry

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https://hal.univ-grenoble-alpes.fr/hal-02341368
Contributor : Marielle Clot <>
Submitted on : Thursday, October 31, 2019 - 1:00:57 PM
Last modification on : Friday, November 6, 2020 - 4:21:05 AM

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Charles Valade, Jérôme Hazart, Sébastien Bérard-Bergery, Elodie Sungauer, Maxime Besacier, et al.. Tilted beam SEM, 3D metrology for industry. Metrology, Inspection, and Process Control for Microlithography XXXIII, Feb 2019, San Jose, United States. pp.32, ⟨10.1117/12.2514977⟩. ⟨hal-02341368⟩

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