Molecular beam mass spectrometry and modelling of CH4–CO2 plasmas in relation with polycrystalline and nanocrystalline diamond deposition

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https://hal.archives-ouvertes.fr/hal-02326620
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Submitted on : Tuesday, October 22, 2019 - 3:29:05 PM
Last modification on : Wednesday, October 23, 2019 - 1:44:42 AM

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L. Vandenbulcke, T. Gries, S. de Persis, C. Met, O. Aubry, et al.. Molecular beam mass spectrometry and modelling of CH4–CO2 plasmas in relation with polycrystalline and nanocrystalline diamond deposition. Diamond and Related Materials, Elsevier, 2010, 19 (7-9), pp.1103-1116. ⟨10.1016/j.diamond.2010.03.018⟩. ⟨hal-02326620⟩

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