Diagnostics and modeling of CH[sub 4]–CO[sub 2] plasmas for nanosmooth diamond deposition: Comparison to experimental data

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https://hal.archives-ouvertes.fr/hal-02326596
Contributor : Thomas Gries <>
Submitted on : Tuesday, October 22, 2019 - 3:24:25 PM
Last modification on : Wednesday, October 23, 2019 - 1:44:43 AM

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T. Gries, L. Vandenbulcke, S. de Persis, O. Aubry, J. Delfau. Diagnostics and modeling of CH[sub 4]–CO[sub 2] plasmas for nanosmooth diamond deposition: Comparison to experimental data. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures / Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structure; Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures;, American Vacuum Society (AVS), 2009, 27 (5), pp.2309. ⟨10.1116/1.3231447⟩. ⟨hal-02326596⟩

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