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Diagnostics and modeling of CH[sub 4]–CO[sub 2] plasmas for nanosmooth diamond deposition: Comparison to experimental data

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https://hal.archives-ouvertes.fr/hal-02326596
Contributor : Thomas Gries Connect in order to contact the contributor
Submitted on : Tuesday, October 22, 2019 - 3:24:25 PM
Last modification on : Monday, December 13, 2021 - 1:52:05 PM

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T. Gries, L. Vandenbulcke, S. de Persis, O. Aubry, J. Delfau. Diagnostics and modeling of CH[sub 4]–CO[sub 2] plasmas for nanosmooth diamond deposition: Comparison to experimental data. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2009, 27 (5), pp.2309. ⟨10.1116/1.3231447⟩. ⟨hal-02326596⟩

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