Refractive index engineering inside silicon by infrared laser pulses of different pulse durations in the picosecond regime

Andong Wang , Amlan Das , Olivier Uteza (1) , D. Grojo (1)

1 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques

We report on the refractive index engineering inside silicon bulk by picosecond infrared lasers. Different responses are observed depending on the pulse durations. This represents a critical step for prototyping 3D silicon photonics microdevices.

Mots clés: (1403390) Laser materials processing; (0406040) Silicon; OCIS codes: (1403070) Infrared and far-infrared lasers

Domaines: Optique [physics.optics]

Andong Wang, Amlan Das, Olivier Uteza, D. Grojo. Refractive index engineering inside silicon by infrared laser pulses of different pulse durations in the picosecond regime. OSA Technical Digest (Optical Society of America), 2019, paper ITh1A.5. ⟨hal-02323418⟩