Effect of Environment on Activation and Sorption of Getter Alloys and Multilayers for Hybrid Wafer-level Vacuum Packaging

Alain Bosseboeuf (1) , Sylvain Lemettre (1) , Ming Wu (1) , Johan Moulin (1) , Philippe Coste (1) , Clément Bessouet (1) , Sana Hammami (1) , Charles Renard (2, 1) , Laetitia Vincent (2, 1)

1 C2N - Centre de Nanosciences et de Nanotechnologies
2 IEF - Institut d'électronique fondamentale

Domaines: Physique [physics]

Alain Bosseboeuf, Sylvain Lemettre, Ming Wu, Johan Moulin, Philippe Coste, et al.. Effect of Environment on Activation and Sorption of Getter Alloys and Multilayers for Hybrid Wafer-level Vacuum Packaging. Sensors and Materials, 2019, 31 (9), pp.2825. ⟨10.18494/SAM.2019.2312⟩. ⟨hal-02322620⟩