Highly Sensitive Surface Acoustic Wave Magnetic Field Sensor Using Multilayered TbCo2/FeCo Thin Film

Aurelien Mazzamurro (1, 2) , Abdelkrim Talbi (1, 2) , Yannick Dusch (1, 3, 2) , Omar Elmazria (4) , Philippe Pernod (1, 2) , Olivier Bou Matar (1, 2) , Nicolas Tiercelin (1, 3, 2)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 AIMAN-FILMS - IEMN - Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN
3 LIA LICS/LEMAC - Laboratoire International associé sur les phénomènes Critiques et Supercritiques en électronique fonctionnelle, acoustique et fluidique
4 IJL - Institut Jean Lamour

Over the last decades, the use of Surface Acoustic Waves (SAW) has emerged as a promising technology in many applications such as filters, signal processing but also sensors. We report the fabrication and the characterization of a SAW delay line magnetic field sensor using uniaxial multi-layered 14x[TbCo2(3.7nm)/FeCo(4nm)] nanostructured thin film deposited on Y36° Lithium Niobate (Figure 1.a). The sensor shows an interesting dependency to a tunable bias magnetic field with different orientations relative to the easy axis. The obtained results are well explained using an equivalent piezo-magnetic model described in a previous work [1,2].

Mots clés: SAW sensor; magnetostriction; DE-effect; multilayered thin film

Domaines: Micro et nanotechnologies/Microélectronique; Electromagnétisme

Aurelien Mazzamurro, Abdelkrim Talbi, Yannick Dusch, Omar Elmazria, Philippe Pernod, et al.. Highly Sensitive Surface Acoustic Wave Magnetic Field Sensor Using Multilayered TbCo2/FeCo Thin Film. 32nd Eurosensors Conference, EUROSENSORS 2018, Sep 2018, Graz, Austria. pp.902, ⟨10.3390/proceedings2130902⟩. ⟨hal-02318300⟩