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Article Dans Une Revue Applied Physics Express Année : 2018

P-type Al-doped Cr-deficient CrN thin films for thermoelectrics

Résumé

Thermoelectric properties of chromium nitride (CrN)-based films grown on c-plane sapphire by dc reactive magnetron sputtering were investigated. In this work, aluminum doping was introduced in CrN (degenerate n-type semiconductor) by co-deposition. Under the present deposition conditions, over-stoichiometry in nitrogen (CrN1+δ) rock-salt structure is obtained. A p-type conduction is observed with nitrogen-rich CrN combined with aluminum doping. The Cr0.96Al0.04N1.17 film exhibited a high Seebeck coefficient and a sufficient power factor at 300 °C. These results are a starting point for designing p-type/n-type thermoelectric materials based on chromium nitride films, which are cheap and routinely grown on the industrial scale.

Dates et versions

hal-02311227 , version 1 (10-10-2019)

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Arnaud Le Febvrier, Ngo van Nong, Grégory Abadias, Per Eklund. P-type Al-doped Cr-deficient CrN thin films for thermoelectrics. Applied Physics Express, 2018, 11 (5), pp.051003. ⟨10.7567/APEX.11.051003⟩. ⟨hal-02311227⟩
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