Integration of resistive switching NiO in small via structures from localized oxidation of nickel metallic layer

L. Courtade (1) , C. Turquat (1) , J.G. Lisoni (2) , L. Goux (2) , D.J. Wouters (2) , D. Deleruyelle (1) , Christophe Muller (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 IMEC - IMEC

Domaines: Matériaux; Matière Condensée [cond-mat]

L. Courtade, C. Turquat, J.G. Lisoni, L. Goux, D.J. Wouters, et al.. Integration of resistive switching NiO in small via structures from localized oxidation of nickel metallic layer. ESSDERC 2008 - 38th European Solid-State Device Research Conference, Sep 2008, Edinburgh, United Kingdom. pp.218-221. ⟨hal-02271988⟩