Simulation of the Temperature Field in a Plasma Micro-discharge inside a Silicon Micro-hole
Résumé
The main objective of this study is to evaluate the thermal behavior of a plasma micro-discharge in two different gases within a silicon micro hole (close to hundred micrometers in size). The first stage of the simulation based on the heat transfer module can return very promising results that are validated by emission spectroscopy (see reference bellow). S. Iseni et al., 'On the validity of neutral gas temperature by emission spectroscopy in micro-disarges close to atmospheric pressure), Accepted in Plasma Sources Science and Technology (PSST).