Epitaxial growth of iridium thin films: a comparison between plasma vs. laser processing

Adrian Bercea (1) , Trupina Lucian (2) , Nedelcu Liviu (2) , Gabriel Banciu (2) , Laure Huitema (3) , Aurelian Crunteanu (4) , F. Dumas-Bouchiat (1) , Corinne Champeaux (1) , Catalin Constantinescu (1)

1 IRCER-AXE2 - IRCER - Axe 2 : procédés plasmas et lasers
2 National Institute for Materials Physics - NIMP (ROMANIA)
3 XLIM-SRF - Systèmes RF
4 XLIM-RFEI - RF-ELITE : RF-Electronique Imprimée pour les Télécommunications et l'Energie

Domaines: Matériaux; Plasmas

Adrian Bercea, Trupina Lucian, Nedelcu Liviu, Gabriel Banciu, Laure Huitema, et al.. Epitaxial growth of iridium thin films: a comparison between plasma vs. laser processing. Spring Meeting of the European Materials Research Society (E-MRS), May 27 to 31, 2019, Nice, France, May 2019, Nice, France. ⟨hal-02267565⟩