CMUT enabled binary mixture gas sensing through time of flight measurement

Luis Iglesias (1) , Priyadarshini Shanmugam (2) , Steven Pena (1) , Jean-François Michaud (2) , Daniel Alquier (2) , Laurent Colin (2) , Dominique Certon (2) , Isabelle Dufour (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

Domaines: Micro et nanotechnologies/Microélectronique

Luis Iglesias, Priyadarshini Shanmugam, Steven Pena, Jean-François Michaud, Daniel Alquier, et al.. CMUT enabled binary mixture gas sensing through time of flight measurement. The 16th International Workshop on Nanomechanical Sensors, 2019, Lausanne, Switzerland. ⟨hal-02191746⟩