F. Patolsky, G. F. Zheng, O. Hayden, M. Lakadamyali, X. W. Zhuang et al., Electrical detection of single viruses, Proceedings of the National Academy of Sciences, vol.101, issue.39, pp.14017-14022, 2004.

F. Palazon, V. Monnier, Y. Chevolot, É. Souteyrand, and J. Cloarec, NANOTRAPS: Different Approaches for the Precise Placement of Micro and Nano-Objects from a Colloidal Dispersion Onto Nanometric Scale Sites of a Patterned Macroscopic Surface, Journal of Colloid Science and Biotechnology, vol.2, issue.4, pp.249-262, 2013.

L. Rahhal, G. T. Ayele, S. Monfray, J. Cloarec, B. Fornacciari et al., High sensitivity pH sensing on the BEOL of industrial FDSOI transistors, Solid-State Electronics, vol.134, pp.22-29, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01987313

G. T. Ayele, S. Monfray, S. Ecoffey, F. Boeuf, J. Cloarec et al., Ultrahigh-Sensitive CMOS pH Sensor Developed in the BEOL of Standard 28 nm UTBB FDSOI, IEEE Journal of the Electron Devices Society, vol.6, pp.1026-1032, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01895308

F. Palazon, P. Rojo-romeo, A. Belarouci, C. Chevalier, H. Chamas et al., Site-Selective Self-Assembly of Nano-Objects on a Planar Substrate Based on Surface Chemical Functionalization, Nanopackaging: From Nanomaterials to the Atomic Scale, pp.93-112, 2015.
URL : https://hal.archives-ouvertes.fr/hal-02060023

. Cloarec, Site-selective self-assembly of nano-objects on a planar substrate based on surface chemical functionalization. Nanopackaging: From Nanomaterials to the Atomic Scale, pp.93-112, 2015.
URL : https://hal.archives-ouvertes.fr/hal-02060023

C. H. Lalander, Y. Zheng, S. Dhuey, S. Cabrini, and U. Bach, DNA-Directed Self-Assembly of Gold Nanoparticles onto Nanopatterned Surfaces: Controlled Placement of Individual Nanoparticles into Regular Arrays, ACS Nano, vol.4, issue.10, pp.6153-6161, 2010.

E. Penzo, M. Palma, R. Wang, H. Cai, M. Zheng et al., Directed Assembly of End-Functionalized Single Wall Carbon Nanotube Segments, Nano Letters, vol.15, issue.10, pp.6547-6552, 2015.

F. Palazon, P. Rojo-romeo, C. Chevalier, T. Géhin, A. Belarouci et al., Nanoparticles selectively immobilized onto large arrays of gold micro and nanostructures through surface chemical functionalizations, Journal of Colloid and Interface Science, vol.447, pp.152-158, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01902089

P. E. Laibinis, J. J. Hickman, M. S. Wrighton, and G. M. Whitesides, Orthogonal Self-Assembled Monolayers: Alkanethiols on Gold and Alkane Carboxylic Acids on Alumina, Science, vol.245, issue.4920, pp.845-847, 1989.

T. J. Gardner, C. D. Frisbie, and M. S. Wrighton, Systems for orthogonal self-assembly of electroactive monolayers on Au and ITO: an approach to molecular electronics, Journal of the American Chemical Society, vol.117, issue.26, pp.6927-6933, 1995.

R. Michel, I. Reviakine, D. Sutherland, C. Fokas, G. Csucs et al., A Novel Approach To Produce Biologically Relevant Chemical Patterns at the Nanometer Scale: Selective Molecular Assembly Patterning Combined with Colloidal Lithography, Langmuir, vol.18, issue.22, pp.8580-8586, 2002.

. Textor, A novel approach to produce biologically relevant chemical patterns at the nanometer scale: selective molecular assembly patterning combined with colloidal lithography, Langmuir, vol.18, pp.8580-8586, 2002.

M. Bergkvist, N. Niamsiri, A. D. Strickland, and C. A. Batt, Substrate selective patterning on lithography defined gold on silica: Effect of end-group functionality on intermolecular layer formation, Surface Science, vol.602, issue.12, pp.2121-2127, 2008.

T. A. Gschneidtner, S. Chen, J. B. Christensen, M. Käll, and K. Moth-poulsen, Toward Plasmonic Biosensors Functionalized by a Photoinduced Surface Reaction, The Journal of Physical Chemistry C, vol.117, issue.28, pp.14751-14758, 2013.

N. Zhang, Y. J. Liu, J. Yang, X. Su, J. Deng et al., High sensitivity molecule detection by plasmonic nanoantennas with selective binding at electromagnetic hotspots, Nanoscale, vol.6, issue.3, pp.1416-1422, 2014.

L. Feuz, M. P. Jonsson, and F. Höök, Material-Selective Surface Chemistry for Nanoplasmonic Sensors: Optimizing Sensitivity and Controlling Binding to Local Hot Spots, Nano Letters, vol.12, issue.2, pp.873-879, 2012.

R. Michel, J. W. Lussi, G. Csucs, I. Reviakine, G. Danuser et al., Selective Molecular Assembly Patterning: A New Approach to Micro- and Nanochemical Patterning of Surfaces for Biological Applications, Langmuir, vol.18, issue.8, pp.3281-3287, 2002.

N. D. Textor and . Spencer, Selective molecular assembly patterning: a new approach to micro-and nanochemical patterning of surfaces for biological applications, Langmuir, vol.18, pp.3281-3287, 2002.

L. Feuz, P. Jönsson, M. P. Jonsson, and F. Höök, Improving the Limit of Detection of Nanoscale Sensors by Directed Binding to High-Sensitivity Areas, ACS Nano, vol.4, issue.4, pp.2167-2177, 2010.

D. Burdinski, M. Saalmink, J. P. Van-den-berg, and C. Van-der-marel, Universal Ink for Microcontact Printing, Angewandte Chemie International Edition, vol.45, issue.26, pp.4355-4358, 2006.

F. Palazon, D. Léonard, T. Le-mogne, F. Zuttion, C. Chevalier et al., Orthogonal chemical functionalization of patterned gold on silica surfaces, Beilstein Journal of Nanotechnology, vol.6, pp.2272-2277, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01363724

Y. Souteyrand, J. P. Chevolot, and . Cloarec, Orthogonal chemical functionalization of patterned gold on silica surfaces, Beilstein J Nanotechnol, vol.6, pp.2272-2277, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01363724

M. Palma, J. J. Abramson, A. A. Gorodetsky, E. Penzo, R. L. Gonzalez et al., Selective Biomolecular Nanoarrays for Parallel Single-Molecule Investigations, Journal of the American Chemical Society, vol.133, issue.20, pp.7656-7659, 2011.

J. Nuckolls, S. J. Hone, and . Wind, Selective biomolecular nanoarrays for parallel single-molecule investigations, J. Am. Chem. Soc, vol.133, pp.7656-7659, 2011.

E. Briand, V. Humblot, J. Landoulsi, S. Petronis, C. Pradier et al., Chemical Modifications of Au/SiO2Template Substrates for Patterned Biofunctional Surfaces, Langmuir, vol.27, issue.2, pp.678-685, 2011.
URL : https://hal.archives-ouvertes.fr/hal-00602936

H. Cai and S. J. Wind, Improved Glass Surface Passivation for Single-Molecule Nanoarrays, Langmuir, vol.32, issue.39, pp.10034-10041, 2016.

F. Battegay and M. Fourel, Barrier material selection for TSV last, flipchip & 3D - UBM & RDL integrations, 2015 IEEE 65th Electronic Components and Technology Conference (ECTC), pp.1183-1192, 2015.

C. K. Wang, S. J. Chang, Y. K. Su, C. S. Chang, Y. Z. Chiou et al., GaN MSM photodetectors with TiW transparent electrodes, Materials Science and Engineering: B, vol.112, issue.1, pp.25-29, 2004.

A. Roshanghias, G. Khatibi, R. Pelzer, and J. Steinbrenner, On the effects of thickness on adhesion of TiW diffusion barrier coatings in silicon integrated circuits, Surface and Coatings Technology, vol.259, pp.386-392, 2014.

S. K. Bhagat, N. D. Theodore, and T. L. Alford, Thermal stability of tungsten?titanium diffusion barriers for silver metallization, Thin Solid Films, vol.516, issue.21, pp.7451-7457, 2008.

S. Wang, S. Suthar, C. Hoeflich, and B. J. Burrow, Diffusion barrier properties of TiW between Si and Cu, Journal of Applied Physics, vol.73, issue.5, pp.2301-2320, 1993.

H. Chiu, C. Chen, C. Yang, H. Kao, F. Huang et al., Highly thermally stable in situ SiNX passivation AlGaN/GaN enhancement-mode high electron mobility transistors using TiW refractory gate structure, Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol.31, issue.5, p.051212, 2013.

J. Chiou, K. Juang, and M. Chen, TiW ( N ) as Diffusion Barriers Between Cu and Si, Journal of The Electrochemical Society, vol.142, issue.7, pp.2326-2331, 1995.

A. Maalaoui, M. Frenea-robin, J. Genest, S. Ecoffey, J. Beauvais et al., Towards miniaturized pH sensor based on carbon nanotubes assembled by DEP on titanium electrodes?, 2018 IEEE International Conference on Industrial Technology (ICIT), pp.1350-1354, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01895325

T. J. Daou, S. Begin-colin, J. M. Grenèche, F. Thomas, A. Derory et al., Phosphate Adsorption Properties of Magnetite-Based Nanoparticles, Chemistry of Materials, vol.19, issue.18, pp.4494-4505, 2007.
URL : https://hal.archives-ouvertes.fr/hal-02417623

D. Toulemon, B. P. Pichon, X. Cattoën, M. W. Man, and S. Begin-colin, 2D assembly of non-interacting magnetic iron oxide nanoparticles via?click? chemistry, Chemical Communications, vol.47, issue.43, p.11954, 2011.
URL : https://hal.archives-ouvertes.fr/hal-00638006

T. Patois, A. Et-taouil, F. Lallemand, L. Carpentier, X. Roizard et al., Microtribological and corrosion behaviors of 1H,1H,2H,2H-perfluorodecanethiol self-assembled films on copper surfaces, Surface and Coatings Technology, vol.205, issue.7, pp.2511-2517, 2010.
URL : https://hal.archives-ouvertes.fr/hal-02300215

F. Laffineur, D. Auguste, F. Plumier, C. Pirlot, L. Hevesi et al., Comparison between CH3(CH2)15SH and CF3(CF2)3(CH2)11SH Monolayers on Electrodeposited Silver, Langmuir, vol.20, issue.8, pp.3240-3245, 2004.

F. Brétagnol, L. Ceriotti, A. Valsesia, T. Sasaki, G. Ceccone et al., Fabrication of functional nano-patterned surfaces by a combination of plasma processes and electron-beam lithography, Nanotechnology, vol.18, issue.13, p.135303, 2007.

. Rossi, Fabrication of functional nano-patterned surfaces by a combination of plasma processes and electron-beam lithography, Nanotechnology, vol.18, p.135303, 2007.

A. V. Ievlev, M. Chyasnavichyus, D. N. Leonard, J. C. Agar, G. A. Velarde et al., Subtractive fabrication of ferroelectric thin films with precisely controlled thickness, Nanotechnology, vol.29, issue.15, p.155302, 2018.

B. R. Chakraborty, D. Haranath, H. Chander, S. Hellweg, S. Dambach et al., TOF-SIMS and laser-SNMS investigations of dopant distribution in nanophosphors, Nanotechnology, vol.16, issue.8, pp.1006-1015, 2005.

E. E. Bedford, S. Boujday, V. Humblot, F. X. Gu, and C. Pradier, Effect of SAM chain length and binding functions on protein adsorption: ?-Lactoglobulin and apo-transferrin on gold, Colloids and Surfaces B: Biointerfaces, vol.116, pp.489-496, 2014.
URL : https://hal.archives-ouvertes.fr/hal-00982250

, Prelim (iii) Title Page, Colloids and Surfaces B: Biointerfaces, vol.116, p.ii, 2014.

C. D. Bain, E. B. Troughton, Y. T. Tao, J. Evall, G. M. Whitesides et al., Formation of monolayer films by the spontaneous assembly of organic thiols from solution onto gold, Journal of the American Chemical Society, vol.111, issue.1, pp.321-335, 1989.

R. G. Nuzzo, B. R. Zegarski, and L. H. Dubois, Fundamental studies of the chemisorption of organosulfur compounds on gold(111). Implications for molecular self-assembly on gold surfaces, Journal of the American Chemical Society, vol.109, issue.3, pp.733-740, 1987.

Z. Yang, Y. Chevolot, T. Géhin, V. Dugas, N. Xanthopoulos et al., Characterization of Three Amino-Functionalized Surfaces and Evaluation of Antibody Immobilization for the Multiplex Detection of Tumor Markers Involved in Colorectal Cancer, Langmuir, vol.29, issue.5, pp.1498-1509, 2013.
URL : https://hal.archives-ouvertes.fr/hal-00872600

G. Ataman-Önal, É. Choquet-kastylevsky, E. Souteyrand, and . Laurencea, Characterization of three amino-functionalized surfaces and evaluation of antibody immobilization for the multiplex detection of tumor markers involved in colorectal cancer, Langmuir, vol.29, pp.1498-1509, 2013.