Processing and sintering of sodium-potasium niobate-based thick films

Hugo Mercier (1) , Barbara Malič (2) , Hana Uršič (2) , Danjela Kuscer (2) , Franck Levassort (1)

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
2 IJS - Jozef Stefan Institute [Ljubljana]

The electrophoretic deposition (EPD) and sintering of (K 0.5 Na 0.5) 0.99 Sr 0.005 NbO 3 (KNNSr) thick films on platinized alumina substrate is reported. We demonstrate that by a two-step deposition-sintering the KNNSr films thicker than 30 μm without defects can be prepared. The effect of the sintering time on structural, microstructural, dielectric and electromechanical characteristics of the KNNSr thick films is discussed. By increasing the sintering time from 2 to 4 hours, the density and the dielectric permittivity of the thick films increased. The unit cell parameters of the perovskite phase decreased which could be related to the formation of polyniobate and volatilization of akalies. Processed KNNSr exhibited promising electromechanical and piezoelectric properties, with a thickness coupling factor up to 35 % and piezoelectric coefficient d 33 up to 80 pC/N

Mots clés: sodium potassium niobate; electromechanical properties; electrophoretic deposition; thick films; piezoelectric properties

Domaines: Matériaux

Hugo Mercier, Barbara Malič, Hana Uršič, Danjela Kuscer, Franck Levassort. Processing and sintering of sodium-potasium niobate-based thick films. Journal of Microelectronics, Electronic Components and Materials, 2017, 47 (3), pp.179-185. ⟨hal-02153562⟩