Ion imaging in a Focused Ion Beam microscope: modeling the channeling contrast to construct EBSD-like orientation maps

Cyril Langlois (1) , Thierry Douillard (1, 2) , S. Dubail (3)

1 MATEIS - Matériaux, ingénierie et science [Villeurbanne]
2 CLYM - Consortium Lyon Saint-Etienne de Microscopie
3 Axon Square SAS

Domaines: Sciences de l'ingénieur [physics]; Matériaux

Cyril Langlois, Thierry Douillard, S. Dubail. Ion imaging in a Focused Ion Beam microscope: modeling the channeling contrast to construct EBSD-like orientation maps. European Microscopy Congress, Aug 2016, Lyon, France. ⟨10.1002/9783527808465.emc2016.6804⟩. ⟨hal-02138328⟩