Dense arrays of millimeter-sized glass lenses fabricated at wafer-level

Jorge Albero (1) , Stéphane Perrin (1) , Sylwester Bargiel (1) , Nicolas Passilly (1) , Maciej Baranski (1) , Ludovic Manuel (1) , Florent Bernard (1) , Luc Froehly (1) , Johann Krauter (2) , Wolfgang Osten (2) , Christophe Gorecki (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 University of Stuttgart

This paper presents the study of a fabrication technique of lenses arrays based on the reflow of glass inside cylindrical silicon cavities. Lenses whose sizes are out of the microfabrication standards are considered. In particular, the case of high fill factor arrays is discussed in detail since the proximity between lenses generates undesired effects. These effects, not experienced when lenses are sufficiently separated so that they can be considered as single items, are corrected by properly designing the silicon cavities. Complete topographic as well as optical characterizations are reported. The compatibility of materials with Micro-Opto-Electromechanical Systems (MOEMS) integration processes makes this technology attractive for the miniaturization of inspection systems, especially those devoted to imaging.

Domaines: Optique [physics.optics]; Acoustique [physics.class-ph]; Matériaux; Micro et nanotechnologies/Microélectronique

Jorge Albero, Stéphane Perrin, Sylwester Bargiel, Nicolas Passilly, Maciej Baranski, et al.. Dense arrays of millimeter-sized glass lenses fabricated at wafer-level. Optics Express, 2015, 23 (9), pp.11702 - 11712. ⟨hal-02131461⟩