Strain Distribution Induced in SOI Photonic Substrate by Through Silicon via Using Advanced Scanning X-Ray Nano-Diffraction

Stephanie Escoubas (1) , B. Vianne , M.-I. Richard (1) , A. Farcy (2) , V. Fiori , O. Thomas (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 STMicroelectronics

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Stephanie Escoubas, B. Vianne, M.-I. Richard, A. Farcy, V. Fiori, et al.. Strain Distribution Induced in SOI Photonic Substrate by Through Silicon via Using Advanced Scanning X-Ray Nano-Diffraction. IEEE Transactions on Device and Materials Reliability, 2018, 18 (4), pp.529-533. ⟨10.1109/TDMR.2018.2881418⟩. ⟨hal-02114463⟩