Magnetic and structural properties of iron nitride thin films obtained by argon‐nitrogen reactive radio‐frequency sputtering

Jean-François Bobo (1) , H. Chatbi (1) , M. Vergnat (1) , L. Hennet (1) , O. Lenoble (1) , Ph. Bauer (1) , M. Piecuch (1)

1 LMPSM - Laboratoire de Métallurgie Physique et Science des Matériaux (URA CNRS 155)

We have prepared iron nitride thin films by reactive rf sputtering of an iron target in an argon-nitrogen plasma. The films present a wide variety of structures and compositions: LY expanded bee iron,, amorphous Fe,- ,-N, , y'-Fe,N, e-Fe,-,N, and l-FqN. Evolutions of the crystallographic structures and of the magnetic properties of the obtained phases are discussed versus the nitrogen concentration in the gaseous Aow and the substrate temperature during deposition. 0 199.5 American Institute of Physics.

Domaines: Physique [physics]; Matière Condensée [cond-mat]; Science des matériaux [cond-mat.mtrl-sci]

Jean-François Bobo, H. Chatbi, M. Vergnat, L. Hennet, O. Lenoble, et al.. Magnetic and structural properties of iron nitride thin films obtained by argon‐nitrogen reactive radio‐frequency sputtering. Journal of Applied Physics, 1995, 77 (10), pp.5309-5313. ⟨10.1063/1.359286⟩. ⟨hal-02113424⟩