Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe

E. Bémont (1) , A. Bostel (1) , M. Bouet (1) , Gérald da Costa (1) , Sylvain Chambreland (1) , Bernard Deconihout (1) , K. Hono (2)

1 GPM - Groupe de physique des matériaux
2 Université de Tsukuba = University of Tsukuba

Domaines: Physique [physics]

E. Bémont, A. Bostel, M. Bouet, Gérald da Costa, Sylvain Chambreland, et al.. Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe. Ultramicroscopy, 2003, 95, pp.231-238. ⟨10.1016/S0304-3991(02)00321-2⟩. ⟨hal-02108195⟩