Quantitative analysis of Si/SiGeC superlattices using atom probe tomography

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https://hal.archives-ouvertes.fr/hal-02107589
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Submitted on : Tuesday, April 23, 2019 - 4:59:14 PM
Last modification on : Thursday, May 16, 2019 - 1:18:03 PM

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Robert Estivill, Adeline Grenier, Sébastien Duguay, François Vurpillot, Tanguy Terlier, et al.. Quantitative analysis of Si/SiGeC superlattices using atom probe tomography. Ultramicroscopy, Elsevier, 2015, 159, pp.223-231. ⟨10.1016/j.ultramic.2015.03.014⟩. ⟨hal-02107589⟩

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