Solving thermal issues in tensile-strained Ge microdisks

A. Elbaz (1) , M. El Kurdi (1) , A. Aassime (1) , S Sauvage (1) , X. Checoury (1) , I. Sagnes (1) , F. Boeuf (2) , Philippe Boucaud (1)

1 C2N - Centre de Nanosciences et de Nanotechnologies [Marcoussis]
2 ST-CROLLES - STMicroelectronics [Crolles]

We propose to use a Ge-dielectric-metal stacking to allow one to address both thermal management with the metal as an efficient heat sink and tensile strain engineering with the buried dielectric as a stressor layer. This scheme is particularly useful for the development of Ge-based optical sources. We demonstrate experimentally the relevance of this approach by comparing the optical response of tensile-strained Ge microdisks with an Al heat sink or an oxide pedestal. Photoluminescence indicates a much reduced temperature rise in the microdisk (16 K with Al pedestal against 200 K with SiO 2 pedestal under a 9 mW continuous wave optical pumping). An excellent agreement is found with finite element modeling of the temperature rise. This original stacking combining metal and dielectrics is promising for integrated photonics where thermal management is an issue.

Domaines: Physique [physics]; Sciences de l'ingénieur [physics]; Optique / photonique; Micro et nanotechnologies/Microélectronique

A. Elbaz, M. El Kurdi, A. Aassime, S Sauvage, X. Checoury, et al.. Solving thermal issues in tensile-strained Ge microdisks. Optics Express, 2018, ⟨10.1364/OE.26.028376⟩. ⟨hal-02106478⟩