Parameterization Models for Traceable Characterization of Planar CPW SOL Calibration Standards

F. Mubarak (1) , V. Mascolo (1) , G. Rietveld (1) , M. Spirito (2) , K. Daffe (3) , Kamel Haddadi (3, 4)

1 VSL, Dutch Metrology Institute
2 TU Delft - Delft University of Technology
3 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
4 CSAM - IEMN - Circuits Systèmes Applications des Micro-ondes - IEMN

Methods for traceable characterization and uncertainty evaluation of planar 1-port CPW short-open-load (SOL) devices are developed. The agreement of modelling and verification measurement results greatly supports the application of the proposed parameterization models and used FEM-based EM modelling of CPW structures for traceable characterization of planar CPW-based SOL devices in the frequency range between a few kHz up to 50 GHz.

Mots clés: nanostructures; on-wafer calibration; EM simulation; VNA; measurement uncertainty; precision measurements; traceability; co-planar waveguide

Domaines: Sciences de l'ingénieur [physics]; Micro et nanotechnologies/Microélectronique

F. Mubarak, V. Mascolo, G. Rietveld, M. Spirito, K. Daffe, et al.. Parameterization Models for Traceable Characterization of Planar CPW SOL Calibration Standards. 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018), Jul 2018, Paris, France. pp.1-2, ⟨10.1109/CPEM.2018.8500810⟩. ⟨hal-02085776⟩