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Ferroelectric Capacitors with "Quasi-Amorphous" BaTiO3 Integrated on Silicon

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https://hal.archives-ouvertes.fr/hal-02081556
Contributor : Sylvie Schamm-Chardon <>
Submitted on : Wednesday, March 27, 2019 - 5:16:44 PM
Last modification on : Thursday, June 3, 2021 - 3:01:29 AM

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  • HAL Id : hal-02081556, version 1

Citation

Lucie Mazet, M.M. Frank, Sylvie Schamm-Chardon, E.A. Cartier, H. Miyazoe, et al.. Ferroelectric Capacitors with "Quasi-Amorphous" BaTiO3 Integrated on Silicon. MRS Spring 2017,, Apr 2017, Phœnix, United States. ⟨hal-02081556⟩

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