Use of Atomic Force Microscopy towards the Development of Nano Devices by Fabricating Oxide Patterns on Titanium thin Film

Nicolas Guillaume (1) , Etienne Puyoo (1) , David Albertini , Nicolas Baboux (1) , Martine Le Berre (1) , Brice Gautier (1) , Calmon F. (1)

1 INL - DE - INL - Dispositifs Electroniques

Domaines: Micro et nanotechnologies/Microélectronique

Nicolas Guillaume, Etienne Puyoo, David Albertini, Nicolas Baboux, Martine Le Berre, et al.. Use of Atomic Force Microscopy towards the Development of Nano Devices by Fabricating Oxide Patterns on Titanium thin Film. First French-German Summer School on Noncontact Atomic Force Microscopy, Oct 2013, Porquerolles, France. ⟨hal-02075144⟩