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Plasma etching applications in concentrated photovoltaic cell fabrication

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https://hal.archives-ouvertes.fr/hal-02074637
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Submitted on : Wednesday, March 20, 2019 - 6:08:01 PM
Last modification on : Friday, November 6, 2020 - 4:34:18 AM

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Mathieu de Lafontaine, Maxime Darnon, Abdelatif Jaouad, Pierre Albert, Boussairi Bouzazi, et al.. Plasma etching applications in concentrated photovoltaic cell fabrication. 12th International Conference on Concentrator Photovoltaic Systems (CPV-12), May 2016, Freibourg, Germany. pp.060001, ⟨10.1063/1.4962091⟩. ⟨hal-02074637⟩

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