Measurement considerations on doping profiles by scanning probe microscopy on semiconductor nanowires and nanostructures

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https://hal.archives-ouvertes.fr/hal-02070996
Contributor : Frédérique Ducroquet <>
Submitted on : Monday, March 18, 2019 - 12:48:49 PM
Last modification on : Friday, January 10, 2020 - 3:42:18 PM

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  • HAL Id : hal-02070996, version 1

Citation

Georges Brémond, Lin Wang, Jean-Michel Chauveau, Corine Sartel, Vincent Sallet, et al.. Measurement considerations on doping profiles by scanning probe microscopy on semiconductor nanowires and nanostructures. Journées Nationales des Nanofils Semiconducteurs, J2N, Nov 2017, Grenoble, France. ⟨hal-02070996⟩

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