Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors

Damien Thuau (1) , Pierre-Henri Ducrot (1) , Philippe Poulin (2) , Isabelle Dufour (1) , Cédric Ayela (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 CRPP - Centre de Recherche Paul Pascal

The technique of fabrication of polymer–carbon nanotube composite fibers with different types of nanotubes is described. An analysis of the structure of the fibers obtained is carried out. The results of measurements of the electrical and mechanical characteristics of fibers are presented.

Mots clés: Polymer MEMS; Electromechanical transducers; Piezoresistivity; Piezoelectricity; Piezo-organic field transistor

Domaines: Sciences de l'ingénieur [physics]; Micro et nanotechnologies/Microélectronique; Matériaux

Damien Thuau, Pierre-Henri Ducrot, Philippe Poulin, Isabelle Dufour, Cédric Ayela. Integrated Electromechanical Transduction Schemes for Polymer MEMS Sensors. Micromachines, 2018, 9 (5), pp.197. ⟨10.3390/mi9050197⟩. ⟨hal-02068775⟩