Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing

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https://hal.archives-ouvertes.fr/hal-02067516
Contributor : Claude Yugma <>
Submitted on : Thursday, March 14, 2019 - 11:50:34 AM
Last modification on : Friday, March 15, 2019 - 1:28:23 AM

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Aabir Chouichi, Jakey Blue, Claude Yugma, François Pasqualini. Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing. 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratog, New York, United States. ⟨hal-02067516⟩

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