Study of implementation of a fuidic microgyrometer based on thermal exchanges

Alain Giani (1, 2) , P. Combette (1, 2) , G. Kock , Benoit Charlot (1, 2) , C. Gauthier-Blum , M. Schneider (3)

1 IES - Institut d’Electronique et des Systèmes
2 M2A - Matériaux, MicroCapteurs et Acoustique
3 ISL - Institut franco-allemand de recherches de Saint-Louis

Domaines: Electronique

Alain Giani, P. Combette, G. Kock, Benoit Charlot, C. Gauthier-Blum, et al.. Study of implementation of a fuidic microgyrometer based on thermal exchanges. ISL Scientific Symposium, 2016, Saint-Louis, France. ⟨hal-02053753⟩