Studies and optimization of the frequency response of a micromachined thermal accelerometer

J. Courteaud (1) , N. Crespy (1) , P. Combette (1, 2) , B. Sorli (1, 2) , Alain Giani (1, 2)

1 IES - Institut d’Electronique et des Systèmes
2 M2A - Matériaux, MicroCapteurs et Acoustique

Domaines: Electronique

J. Courteaud, N. Crespy, P. Combette, B. Sorli, Alain Giani. Studies and optimization of the frequency response of a micromachined thermal accelerometer. Sensors and Actuators A: Physical , 2008, 147 (1), pp.75-82. ⟨10.1016/j.sna.2008.03.015⟩. ⟨hal-02049189⟩