Miniaturized 3D gas sensors based on silicon nanowires for ppb range detection

Brieux Durand (1) , Aurélie Lecestre (2) , Philippe Menini (3) , Guilhem Larrieu (1)

1 LAAS-MPN - Équipe Matériaux et Procédés pour la Nanoélectronique
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
3 LAAS-MICA - Équipe MICrosystèmes d'Analyse

Here, we reported 3D devices implemented on silicon nanowires (SiNW) for chemical gas sensing, working at room temperature and in presence of moisture or interfering gas. This sensor combines for the first time high sensibility, selectivity, reversibility, low-power consumption and reliability in real condition. In addition the sensors are miniaturized and develop through a cost effective and large scale approach.

Domaines: Micro et nanotechnologies/Microélectronique

Brieux Durand, Aurélie Lecestre, Philippe Menini, Guilhem Larrieu. Miniaturized 3D gas sensors based on silicon nanowires for ppb range detection. IEEE Nanotechnology Materials and Devices Conference (NMDC 2016), Oct 2016, Toulouse, France. pp.1-2, ⟨10.1109/NMDC.2016.7777098⟩. ⟨hal-02046543⟩