CuO nanostructured sensors for enhanced CO detection

Justyna Jońca (1) , R Lai-Cheong , Myrtil L. Kahn (1) , Katia Fajerwerg (1, 2) , Céline Combettes (3) , Vincent Bley (4) , Philippe Menini (5) , Pierre Fau (1, 2)

1 LCC - Laboratoire de chimie de coordination
2 UT3 - Université Toulouse III - Paul Sabatier
3 CIRIMAT - Centre interuniversitaire de recherche et d'ingenierie des matériaux
4 LAPLACE-MDCE - Matériaux Diélectriques dans la Conversion d’Energie
5 LAAS-MICA - Équipe MICrosystèmes d'Analyse

In order to increase the selectivity of semi-conducting gas sensors CuO, ZnO nanostructures have been integrated as sensitive layers on silicon substrates. A metalorganic approach has been employed for the preparation of CuO and ZnO anisotropic nanoparticles. Their gas sensing performance towards CO, C 3 H 8 have been tested. The influence of the oxide nature is significant on the sensor response level and its selectivity to the reducing gases. Moreover, at an operating temperature T = 200°C, the sensors present an optimum performance towards CO with fast response and recovery time, unprecedented sensitivity (Rn= ca. 150%, 100 ppm CO, RH 50%) and selectivity as compared to NO 2 , C 3 H 8 and NH 3. Thus, these results highlight the remarkable role of CuO on the fabrication of very promising CO gas sensors. Motivation and results

Domaines: Micro et nanotechnologies/Microélectronique

Justyna Jońca, R Lai-Cheong, Myrtil L. Kahn, Katia Fajerwerg, Céline Combettes, et al.. CuO nanostructured sensors for enhanced CO detection. EUROSENSORS 2017, Sep 2017, Paris, France. ⟨hal-02046330⟩