Surface structuring of diamond-like carbon films by colloidal lithography with silica sub-micron particles

C. Corbella (1) , S. Portal (1) , Miguel Rubio-Roy (1) , M. Vallvé (2) , J. Ignes-Mullol (2) , E. Bertran (1) , J. Andújar (1)

1 FEMAN - FEMAN
2 SOC&SAM Group

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Mécanique des matériaux [physics.class-ph]; Matériaux et structures en mécanique [physics.class-ph]; Plasmas; Matériaux; Sciences de l'ingénieur [physics]

C. Corbella, S. Portal, Miguel Rubio-Roy, M. Vallvé, J. Ignes-Mullol, et al.. Surface structuring of diamond-like carbon films by colloidal lithography with silica sub-micron particles. Diamond and Related Materials, 2010, 19 (7-9), pp.1124-1130. ⟨hal-02017578⟩