Structured epitaxial graphene growth on SiC by selective graphitization using a patterned AlN cap

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https://hal.archives-ouvertes.fr/hal-02017537
Contributor : Miguel Rubio-Roy <>
Submitted on : Wednesday, February 13, 2019 - 11:19:10 AM
Last modification on : Wednesday, February 13, 2019 - 11:19:10 AM

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  • HAL Id : hal-02017537, version 1

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Miguel Rubio-Roy, Farhana Zaman, Yike Hu, Claire Berger, Michael Moseley, et al.. Structured epitaxial graphene growth on SiC by selective graphitization using a patterned AlN cap. Applied Physics Letters, American Institute of Physics, 2010, 96 (8), pp.082112. ⟨hal-02017537⟩

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