Structured epitaxial graphene growth on SiC by selective graphitization using a patterned AlN cap

Miguel Rubio-Roy (1) , Farhana Zaman (2) , Yike Hu (1) , Claire Berger (1) , Michael Moseley (2) , James Meindl (2) , Walt A de Heer (1)

1 School of Physics [Atlanta]
2 School of Electrical and Computer Engineering [Atlanta]

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Matière Condensée [cond-mat]; Systèmes mésoscopiques et effet Hall quantique [cond-mat.mes-hall]; Physique [physics]

Miguel Rubio-Roy, Farhana Zaman, Yike Hu, Claire Berger, Michael Moseley, et al.. Structured epitaxial graphene growth on SiC by selective graphitization using a patterned AlN cap. Applied Physics Letters, 2010, 96 (8), pp.082112. ⟨hal-02017537⟩